Widodo, S. (2012) “TEKNIK PELAPISAN SILIKON DIOKSIDA (SiO2) DENGAN ALAT RF-SPUTTERING ARC-12M”, PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL), 1(1), pp. 82 - 88. Available at: https://journal.unj.ac.id/unj/index.php/prosidingsnf/article/view/6158 (Accessed: 2May2024).