Widodo, S. “TEKNIK PELAPISAN SILIKON DIOKSIDA (SiO2) DENGAN ALAT RF-SPUTTERING ARC-12M”. PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL), Vol. 1, no. 1, Oct. 2012, pp. 82 -88, https://journal.unj.ac.id/unj/index.php/prosidingsnf/article/view/6158.