STUDI STRUKTUR KRISTAL LAPISAN TIPIS SENG OKSIDA DENGAN DOPING MAGNESIUM (ZNO:MG) 0.08 MOL MENGGUNAKAN TEKNIK PENGHALUSAN RIETVELD
Abstract
Abstrak
Pada penelitian ini telah dilakukan pendeposisian lapisan tipis ZnO tanpa doping dan dengan doping Mg menggunakan teknik teknik Ultrasonic Spray Pyrolysis (USP) di atas substrat silicon (Si) pada suhu 450oC dengan frekuensi 1.7 MHz selama 15 menit. Zinc Acetate Dyhydrate [Zn(CH3COO)2] digunakan sebagai prekusor Zn dan Mg(CH3COO)24H2O sebagai prekusor Mg dengan konsentrasi 0.08 mol. Struktur kristal lapisan tipis ZnO tanpa doping dan dengan doping Mg (0.08 mol) dianalisis menggunakan teknik difraksi sinar-x (XRD). Berdasarkan pola XRD terkonfirmasi bahwa struktur kristal dari lapisan tipis ZnO dan ZnO:Mg adalah polikristalin dengan bentuk hexagonal wurtzite. Analisis struktur kristal lebih lajut pada lapisan tipis ZnO tanpa doping dan dengan doping Mg akan dilakukan menggunakan teknik penghalusan Rietveld agar diperoleh data yang lebih baik.
Kata-kata kunci: Lapisan tipis ZnO, Doping Mg, XRD, Teknik Penghalusan Rietveld
Abstract
This research has been carried out in the form of undoped and Mg-doped ZnO (ZnO:Mg) thin films using Ultrasonic Spray Pyrolysis (USP) technique which has deposited on the silicon (Si) substrate at 450oC with ultrasonic frequency of 1.7 MHz for 15 minutes. Zinc Acetate Dyhydrate [Zn(CH3COO)2] were used as precursor of Zn and the compound sources of Mg(CH3COO)24H2O were used as precursor of Mg with the composition of 0.08 mol. Crystal structure of undoped and Mg-doped ZnO thin films has been investigated using X-Ray Diffraction (XRD). As a result, acquired from XRD pattern reveals that the growth of undoped and Mg-doped ZnO thin films has polycrystalline with hexagonal wurtzite structure. In addition, the crystal structure of undoped and Mg-doped ZnO thin films would be analyzed meticulously using Rietveld refinement method in order to get appropriate data.
Keywords: ZnO Thin Films, Mg dopant, XRD, Rietveld Refinement Method
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