STUDI STRUKTUR KRISTAL LAPISAN TIPIS SENG OKSIDA YANG DIDOPING MAGNESIUM (ZNO:MG) 0.04 MOL MENGGUNAKAN RIETVELD REFINEMENT

Annisa Nurul Aini; Iwan Sugihartono; Isnaeni Isnaeni; Achmad Ainul Yaqin

doi:10.21009/03.1101.FA17

Annisa Nurul Aini Program Studi Fisika, Fakultas Matematika dan Ilmu Pengetahuan Alam, Universitas Negeri Jakarta, Jalan Rawamangun Muka, Jakarta Timur, DKI Jakarta, 13220, Indonesia
Iwan Sugihartono Program Studi Fisika, Fakultas Matematika dan Ilmu Pengetahuan Alam, Universitas Negeri Jakarta, Jalan Rawamangun Muka, Jakarta Timur, DKI Jakarta, 13220, Indonesia
Isnaeni Isnaeni Badan Riset dan Inovasi Nasional Republik Indonesia, Jalan M.H. Thamrin, Jakarta Pusat, DKI Jakarta, 10340, Indonesia
Achmad Ainul Yaqin Fakultas Matematika dan Ilmu Pengetahuan Alam, Universitas Negeri Jakarta, Jalan Rawamangun Muka, Jakarta Timur, DKI Jakarta, 13220, Indonesia

DOI: https://doi.org/10.21009/03.1101.FA17

Abstract

Abstrak

Pada penelitian ini telah dilakukan pendeposisian lapisan tipis ZnO menggunakan doping Mg 0.04 mol di atas substrat silikon (Si) pada suhu 450^oC. Pendeposisian lapisan tipis ZnO dilakukan dengan metode ultrasonic spray pyrolysis pada frekuensi 1.7MHz selama 15 menit. Karakterisasi struktur kristal dilakukan menggunakan X-Ray Diffractrometer. Pengaruh Mg 0.04 mol dianalisis dengan membandingkan sampel pada lapisan tipis ZnO tanpa doping. Berdasarkan pada pola difraksi sinar-x (XRD), terkonfirmasi bahwa lapisan tipis ZnO tanpa doping (undoped) dan doping Mg memiliki struktur polikristal hexagonal wurtzite. Hasil XRD menunjukkan bahwa sampel memiliki preferential orientation sepanjang sumbu-c dengan doping Mg. Hasil XRD juga menunjukkan bahwa semua sampel lapisan tipis baik tanpa doping maupun yang didoping Mg menunjukkan bahwa (002) merupakan puncak yang lebih kuat dari puncak yang lain. Oleh karena itu, ion Mg berhasil menempati lattice site. Analisis struktur kristal lebih lanjut telah dilakukan dengan menggunakan teknik penghalusan Rietveld secara sistematis dan komprehensif.

Kata-kata kunci: Lapisan Tipis ZnO, Doping Mg, Penghalusan Rietveld, USP, Struktur Kristal

Abstract

In this study, 0.04 mol Mg doped ZnO thin film has been deposited by using ultrasonic spray pyrolysis method at 1.7MHz for 15 minutes on Si substrate at 450^oC. The crystal structure characterization was investigated using X-Ray Diffractometer. The effect of 0.04 mol Mg doped ZnO thin film was analyzed by comparison with the undoped ZnO thin film. The XRD results confirmed that the Mg doped ZnO and undoped ZnO thin films were well polycrystalline with hexagonal wurtzite structure. XRD results show that the sample has a preferential orientation along the c-axis with Mg doping. XRD results also showed that ZnO thin film and Mg doped ZnO thin film indicated that (002) was a stronger peak than the other peaks. Therefore, Mg ions have successfully occupied the lattice site. In addition, the crystal structure was carried out using the Rietveld refinement systematically and comprehensively.

Keywords: ZnO Thin Films, Mg Doped, Rietveld Refinement, USP, Crystal Structure

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