KARAKTERISASI OPTIK DAN SIFAT LISTRIK FILM LiTaO3  PADA VARIASI SUHU ANNEALING

Ira Ukhtianingsih; Yulia Sani; Irzaman Irzaman

KARAKTERISASI OPTIK DAN SIFAT LISTRIK FILM LiTaO3 PADA VARIASI SUHU ANNEALING

Authors

Ira Ukhtianingsih Mahasiswa Departemen Fisika, FMIPA, Institut Pertanian Bogor, Kampus IPB Darmaga, Bogor, 16680
Yulia Sani Mahasiswa Departemen Fisika, FMIPA, Institut Pertanian Bogor, Kampus IPB Darmaga, Bogor, 16680
Irzaman Irzaman Staf Pengajar Departemenen Fisika, Institut Pertanian Bogor, Kampus IPB Darmaga, Bogor, 16680

Abstract

LiTaO₃ thin films has been grown upper side on p-type Si (100) substrates using Chemical Solution Deposition (CSD) methods followed by spin coating its speed 3000 rpm with dropped for 30 seconds in solubility 1 M. Thin films was annealed at 550 ËšC, 575 ËšC, 600 ËšC and 625 ËšC with increasing degree of annealed 1.67 ËšC/minutes. This conductivity values is semiconductor and conductivity. It might be effect the result of optical test showed LiTaO₃ thin films could absorb in UV wavelength. It is convincing that LiTaO₃ promise to be used for infrared sensor.

Keywords: conductive, LiTaO₃, optical, p-type silicon, semiconductor.

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Published

2015-10-30

How to Cite

Ukhtianingsih, I., Sani, Y., & Irzaman, I. (2015). KARAKTERISASI OPTIK DAN SIFAT LISTRIK FILM LiTaO3 PADA VARIASI SUHU ANNEALING. PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL), 4, SNF2015–VII. Retrieved from https://journal.unj.ac.id/unj/index.php/prosidingsnf/article/view/5201