ANALISIS CELAH ENERGI PADA FILM TIPIS Ba0,375Sr0,625TiO3 DI ATAS SUBSTRAT KACA INDIUM TIN OXIDE (ITO) DAN SUBSTRAT SI (100) TIPE P
DOI:
https://doi.org/10.21009/03.1401.FA09Abstract
Film tipis Ba0,375Sr0,625TiO3 berhasil difabrikasi pada substrat kaca Indium Tin Oxide (ITO) dan substrat Silikon(100) tipe-P menggunakan metode Chemical Solution Deposition (CSD) dengan larutan prekursor berkonsentrasi 0,5 M. Proses pelapisan dilakukan melalui teknik spin coating pada kecepatan 3000 rpm, diikuti dengan proses annealing pada suhu 550 °C dengan laju pemanasan 100 °C per jam selama 16 jam, kemudian didinginkan secara bertahap hingga suhu kamar. Substrat kaca ITO yang digunakan memiliki ketebalan 1,1 mm dan resistivitas sekitar 20 ohm per kuadrat, sedangkan substrat Si(100) tipe-P memiliki resistivitas sekitar 10 ohm per kuadrat. Sifat optik film tipis dikarakterisasi menggunakan spektrofotometer UV-Vis pada rentang panjang gelombang 230 hingga 850 nm. Hasil pengukuran menunjukkan nilai celah pita energi sebesar 1,57 eV pada substrat ITO dan 2,51 eV pada substrat Si(100) tipe-P. Analisis celah pita dari film tipis Ba0,375Sr0,625TiO3 pada kedua jenis substrat ini penting dilakukan karena material tersebut berpotensi sebagai kandidat utama untuk aplikasi sensor tekanan di masa mendatang.
References
[1] L. Wang, M. Zhu, Y. Shao, Y. Zhao, C. Wei, L. Gao, and Y. Bao, “Smart Sensing Multifunctionalities Based on Barium Strontium Titanate Thin Films,” Sensors, vol. 22, no. 19, p. 7183, 2022.
[2] M. S. Afanasiev, D. A. Kiselev, A. A. Sivov, and G. V. Chucheva, “Synthesis and Piezoelectric Properties of Freestanding Ferroelectric Films Based on Barium Strontium Titanate,” Modern Electronic Materials, vol. 9, no. 4, pp. 163–168, 2023.
[3] J. Liu et al., “Energy Storage Properties of Sol-Gel-Processed SrTiO₃ Films,” Materials, vol. 16, no. 1, p. 31, 2023.
[4] A. Boubaia et al., “Band Gap and Emission Wavelength Tuning of Sr-Doped BaTiO₃ (BST) Perovskites for High-Efficiency Visible-Light Emitters and Solar Cells,” Materials Science in Semiconductor Processing, vol. 130, p. 105837, 2021.
[5] Irzaman et al., “The Effect of Photoconductive Mole Fraction Based on 0.500) on Electrical Properties and Diffusivity Coefficient,” Biointerface Research in Applied Chemistry, vol. 11, no. 6, pp. 14956–14963, 2021.
[6] M. G. Elmahgary et al., “Optical Investigation and Computational Modelling of BaTiO₃ for Optoelectronic Devices Applications,” Scientific Reports, vol. 13, no. 1, pp. 1–13, 2023.
[7] C. Mansour et al., “Effect of Thermal Annealing on the Morphology of Sol-Gel Processed Barium Strontium Titanate Thin Films: Consequences on Electrical Properties,” AIP Advances, vol. 10, no. 6, p. 065113, 2020.
[8] Irzaman et al., “Ferroelectric Sensor BaₓSr₁₋ₓTiO₃ Integrated with Android Smartphone for Controlling and Monitoring Smart Street Lighting,” Journal of King Saud University – Science, vol. 34, no. 6, p. 102180, 2022.
[9] Irzaman et al., “Design and Fabrication of Photovoltaics Based on MFS (Ag/BaTiO₃/Silicon p-Type) Structure,” Materials Science for Energy Technologies, vol. 7, pp. 29–34, 2024.
[10] A. Abramov et al., “Chemical Solution Deposition of BiFeO₃ Films with Layer-by-Layer Control of the Coverage and Composition,” Coatings, vol. 10, no. 5, p. 438, 2020.
[11] B. I. Edmondson et al., “Epitaxial, Electro-Optically Active Barium Titanate Thin Films on Silicon by Chemical Solution Deposition,” Journal of the American Ceramic Society, vol. 103, no. 2, pp. 1209–1218, 2020.
[12] H. Wang et al., “Aqueous Chemical Solution Deposition of Functional Double Perovskite Epitaxial Thin Films,” Chemistry – A European Journal, vol. 26, no. 42, pp. 9338–9347, 2020.
[13] A. N. Nguyen et al., “Spin Coating and Micro-Patterning Optimization of Composite Thin Films Based on PVDF,” Materials, vol. 13, no. 6, p. 1342, 2020.
[14] Irzaman et al., “The Influence of Cuprum (II) Acetate Dopant and Heating Temperature in the Fabrication of Thin Films of Barium Strontium Titanate (Ba₀.₄Sr₀.₆TiO₃),” Journal of Physics: Conference Series, vol. 2866, no. 1, p. 012021, 2024.
[15] A. Lebbad et al., “Surface Morphology, Structural and Electrical Properties of RF-Sputtered ITO Thin Films on Si Substrates,” Bulletin of Materials Science, vol. 41, no. 3, 2018.
[16] J. Kim et al., “High-Temperature Optical Properties of Indium Tin Oxide Thin Films,” Scientific Reports, vol. 10, no. 1, pp. 1–9, 2020.
[17] O. Yavas and M. Takai, “Effect of Substrate Absorption on the Efficiency of Laser Patterning of Indium Tin Oxide Thin Films,” Journal of Applied Physics, vol. 85, no. 8, pp. 4207–4212, 1999.
[18] (Duplikasi dari [9]) — Entri ini telah tercantum sebelumnya dan dihilangkan untuk menghindari pengulangan.
[19] R. Nasui et al., “Flexible BaTiO₃ Thin Films with Piezoelectric Properties Using Chemical Synthesis Techniques,” SSRN Preprint, 2023.
[20] S. Taleb et al., “From Synthesis to Application: High-Quality Flexible Piezoelectric Sensors Fabricated from Tetragonal BaTiO₃/P(VDF-TrFE) Composites,” Sensors and Actuators A: Physical, vol. 361, p. 114585, 2023.
[21] N. Djohan et al., “Structural, Optical Properties and Raman Spectroscopy of In₂O₃-Doped LiTaO₃ Thin Films,” International Journal of Nanoelectronics and Materials, vol. 15, no. 1, pp. 17–26, 2022.
[22] D. Warono and Syamsudin, “Unjuk Kerja Spektrofotometer untuk Analisa Zat Aktif Ketoprofen,” Konversi, vol. 2, no. 2, pp. 57–65, 2013.
[23] M. Zuhri and H. F. Ramadhan, “Synthesis and Characterization of SrTiO₃ Doped with Bi(CH₃COO)₃,” International Journal of Nanoelectronics and Materials, vol. 16, pp. 169–182, Dec. 2023.
[24] J. Iskandar et al., “Characterizations of Electrical and Optical Properties on Ferroelectric Photodiode of Ba₀.₅Sr₀.₅TiO₃ Films Based on Annealing Time Differences and Its Development as Light Sensor on Satellite Technology,” Procedia Environmental Science, vol. 24, pp. 324–328, 2015.
[25] M. Patel et al., “Nanostructured SnS with Inherent Anisotropic Optical Properties for High Photoactivity,” Nanoscale, vol. 8, no. 4, pp. 2293–2303, 2016.
[26] S. C. Her and C. F. Chang, “Fabrication and Characterization of Indium Tin Oxide Films,” Journal of Applied Biomaterials & Functional Materials, vol. 15, no. 2, pp. e170–e175, 2017.
[27] T. Xu et al., “Piezoresistive Pressure Sensor with High Sensitivity for Medical Application Using Peninsula-Island Structure,” Frontiers of Mechanical Engineering, vol. 12, no. 4, pp. 546–553, 2017.
[28] U. Anindy, M. Nur Indro, and I. Husein, “Piezoelectric Properties: Cerium Oxide (CeO₂) Doped Barium Titanate (BaTiO₃) Film on ITO Substrate,” Ferroelectrics, vol. 570, no. 1, pp. 162–175, 2021.
