ANALISIS CELAH ENERGI LAPISAN TIPIS BA0,75SR0,25TIO3 DI ATAS SUBSTRAT KACA INDIUM TIN OXIDE (ITO) DAN SUBSTRAT SI (100) TIPE-P
DOI:
https://doi.org/10.21009/03.1401.FA13Abstract
Lapisan tipis Ba0,75Sr0,25TiO3 pada substrat kaca Indium Tin Oxide (ITO) dan Substrat Si (100) Tipe-P telah berhasil dibuat dengan metode Chemical Solution Deposition (CSD) dengan kelarutan 0,5 M yang dibantu dengan spin coating 3000 rpm, dan annealing pada suhu 550 ℃ dengan kelajuan suhu 100 ℃/jam yang ditahan selama 16 jam dan suhu pendinginan hingga suhu kamar. Substrat kaca Indium Tin Oxide (ITO) dengan ketebalan kaca 1,1 mm. Lapisan tipis ini diuji sifat optiknya menggunakan Spektrofotometer UV-Vis dengan rentang 230 – 800 nm menghasilkan celah energi sebesar 2,84 eV di atas substrat Indium Tin Oxide (ITO) dan menghasilkan celah energi sebesar 2,24 eV di atas substrat Si (100) Tipe-P. Analisis celah energi pada lapisan tipis Ba0,75Sr0,25TiO3 pada substrat kaca Indium Tin Oxide (ITO) dan di atas substrat Si (100) Tipe-P sangat penting karena lapisan ini merupakan cikal bakal sensor tekanan.
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