WIDODO, Slamet; KRISTIANTORO, Tony. TEKNOLOGI MICRO ELECTRO MECHANICAL SYSTEMS. PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL), [S. l.], v. 3, p. 321–333, 2014. Disponível em: https://journal.unj.ac.id/unj/index.php/prosidingsnf/article/view/5541. Acesso em: 23 nov. 2024.