Widodo, Slamet, and Nanang Sudrajad. 2014. “PROSES PHOTOLITHOGRAPHY DALAM FABRIKASI DIVAIS SEMIKONDUKTOR”. PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL) 3 (October):306-16. https://journal.unj.ac.id/unj/index.php/prosidingsnf/article/view/5539.