Widodo, S. and Sudrajad, N. (2014) “PROSES PHOTOLITHOGRAPHY DALAM FABRIKASI DIVAIS SEMIKONDUKTOR”, PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL), 30, pp. 306 - 316. Available at: https://journal.unj.ac.id/unj/index.php/prosidingsnf/article/view/5539 (Accessed: 3May2024).