Widodo S. TEKNOLOGI PENDEPOSISIAN FILM TIPIS METAL DENGAN METODE DC-SPUTTERING. PROSIDING SNF [Internet]. 2012 Oct. 30 [cited 2024 Nov. 22];1(1):76-81. Available from: https://journal.unj.ac.id/unj/index.php/prosidingsnf/article/view/6157