BUDI, Esmar; RAZALI, M. Mohd.; NIZAM, A.R. Md. SURFACE MORPHOLOGY OF SPUTTERED TITANIUM-ALUMINUM-NITRIDE COATINGS. Spektra: Jurnal Fisika dan Aplikasinya, [S. l.], v. 5, n. 1, p. 79–86, 2020. DOI: 10.21009/SPEKTRA.051.09. Disponível em: https://journal.unj.ac.id/unj/index.php/spektra/article/view/14489. Acesso em: 5 nov. 2024.